 |
|
| If you can't view the Datasheet, Please click here to try to view without PDF Reader . |
|
|
|
| If you can't view the Datasheet, Please click here to try to view without PDF Reader . |
|
|
| Datasheet File OCR Text: |
| 4200-SCS Semiconductor Characterization System The easy-to-use Model 4200-SCS Semiconductor Characterization System performs lab grade DC device characterization, real-time plotting, and analysis with high precision and sub-femtoamp resolution. The 4200-SCS offers the most advanced capabilities available in a fully integrated characterization system, including a complete, embedded PC with Windows NT operating system and mass storage. Its self-documenting, point-and-click interface speeds and simplifies the process of taking data, so users can begin analyzing their results sooner. A Total System Solution The Model 4200-SCS provides a total system solution for DC characterization of semiconductor devices and test structures. This advanced parameter analyzer provides intuitive and sophisticated capabilities for semiconductor device characterization. The 4200-SCS combines unprecedented measurement speed and accuracy with an embedded Windows NT-based PC and the Keithley Interactive Test Environment (KITE) to provide a powerful single-box solution. The Keithley Interactive Test Environment allows users to gain familiarity quickly with tasks such as managing tests and results and generating reports. Sophisticated and simple test sequencing and external instrument drivers simplify performing automated device and wafer testing with combined I-V and C-V measurements. The 4200-SCS is modular and configurable. The system supports up to eight Source-Measure Units, including up to four high-power SMUs with 1A/20W capability. * Intuitive, point-and-click Windowsbased environment * Unique Remote PreAmps extend the resolution of SMUs to 0.1fA * Self-contained PC provides fast test setup, powerful data analysis, graphing and printing, and on-board mass storage of test results. * Unique browser-style Project Navigator organizes tests by device type, allows access to multiple tests, and provides test sequencing and looping control * Integrated support for Keithley Model 590 and Agilent 4284 C-V meters, Keithley switch matrix configurations, and Agilent 81110 pulse generators * Hardware controlled by the Keithley Interactive Test Environment (KITE). User Test Module function extends KITE for external instrument control and test station integration. * Includes software drivers for Cascade Microtech Summit 12K Series, Karl Suss Model PA-200, Micromanipulator Model 8860, and manual probers. Extended Measurement Resolution An optional Remote PreAmp, the 4200-PA, extends the system's measurement resolution from 100fA to 0.1fA by effectively adding five current ranges to either SMU model. The PreAmp module is fully integrated with the system; to the user, the SMU simply appears to have additional measurement resolution available. The Remote PreAmp is shipped installed on the back panel of the 4200-SCS for local operation. This installation allows for standard cabling to a prober, test fixture, or switch matrix. Users can remove the PreAmp from the back panel and place it in a remote location (such as in a light-tight enclosure or on the prober platen) to eliminate measurement problems due to long cables. Platen mounts and triax panel mount accessories are available. KTE Interactive Software Tools KTE Interactive includes four software tools for operating and maintaining the 4200-SCS in addition to the Windows(R) NT operating system: * Keithley Interactive Test Environment (KITE)--The 4200-SCS device characterization application * Keithley User Library Tool (KULT)--Allows test engineers to integrate custom algorithms into KITE using 4200-SCS or external instruments. * Keithley External Control Interface (KXCI)--The 4200-SCS application for controlling the 4200-SCS from an external computer via the GPIB bus. The Keithley Interactive Test Environment (KITE) The Keithley Interactive Test Environment (KITE) is the Model 4200-SCS Windows device characterization application. It provides advanced test definition, parameter analysis and graphing, and automation capabilities required for modern semiconductor characterization. 1.888.KEITHLEY (U.S. only) www.keithley.com A GREATER MEASURE OF CONFIDENCE SEMICONDUCTOR * Keithley Configuration Utility (KCON)--Allows test engineers to define the configuration of GPIB instruments, switch matrices, and analytical probers connected to the 4200-SCS. It also provides system diagnostics functions. Lab grade DC device charactterization The powerful test library management tools included allow standardizing test methods and extractions to ensure consistent test results. The 4200-SCS offers tremendous flexibility, with hardware options that include four different switch matrix configurations, a choice of Keithley and Agilent C-V meters, and pulse generators. A variety of customer support packages are also available, including applications support, calibration, and repair. 4200-SCS Semiconductor Characterization System The Keithley Interactive Test Environment is designed to let users understand device behavior quickly. When running a test sequence, users can view results and plots for completed tests while the sequence is still running. As shown here, multiple plots can be viewed at the same time to get a complete picture of device performance. Ordering Information 4200-SCS/F Flat Panel Display 4200-SCS/C Composite Front Bezel; requires an external SVGA display Accessories Supplied Reference and User Manual on CD-ROM and printed User Manual included with 4200-SCS 236-ILC-3 Interlock Cable, 3m (one included with 4200-SCS) Note: All 4200-SCS systems and instrument options are supplied with required cables of 2m length. COMPUTER OPTIONS 4200-CRT 4200-MOUSE 4200-MAG-BASE 4200-VAC-BASE 4200-TMB 17 SVGA CRT Microsoft 2 Button Mouse Magnetic Base for mounting 4200-PA on a prober platen Vacuum Base for mounting 4200-PA on a prober platen Triaxial mounting bracket for mounting 4200PA on a triaxial mounting panel Printed Manual Set Roll-Around Cart Component Test Fixture Semiconductor Test Fixture High Frequency C-V Analyzer, 100kHz/1MHz Calibration Sources for Model 590 C-V Analyzer Lab grade DC device charactterization ACCESSORIES AVAILABLE ADDITIONAL CABLES AND CONNECTORS 4200-RPC-0.3 4200-RPC-2 4200-RPC-3 4200-RPC-6 4200-TRX-0.3 Remote PreAmp Cable, 0.3m (for use inside prober shield) Remote PreAmp Cable, 2m (for remote location of 4200-PA, one included with each 4200-PA) Remote PreAmp Cable, 3m (for remote location of 4200-PA) Remote PreAmp Cable, 6m (for remote location of 4200-PA) Ultra Low Noise PreAmp Triax Cable, 0.3m, (Triax-Triax, connects 4200-PA to a test fixture, recommended for remote location of the 4200-PA) Ultra Low Noise PreAmp Triax Cable, 1m, (Triax-Triax, connects 4200-PA to a test fixture) Ultra Low Noise PreAmp Triax Cable, 2m, (Triax-Triax, connects 4200-PA to a test fixture, two included with each 4200-PA) Ultra Low Noise PreAmp Triax Cable, 3m, (Triax-Triax, connects 4200-PA to a test fixture) Ultra Low Noise SMU Triax Cable, 1m (Mini Triax-Triax, connects 4200 SMUs to a test fixture) Ultra Low Noise SMU Triax Cable, 2m (Mini Triax-Triax, connects 4200 SMUs to a test fixture, two included with each 4200 SMU that is not configured with a Remote PreAmp) Ultra Low Noise SMU Triax Cable, 3m (Mini Triax-Triax, connects 4200 SMUs to a test fixture) Interlock Cable, 3m (one included with each 4200-SCS) Shielded IEEE-488 Cable (1m) Shielded IEEE-488 Cable (2m) Coaxial connector for connecting coax instruments to a triax matrix REMOTE PREAMP MOUNTING OPTIONS OTHER ACCESSORIES 4200-MAN 4200-CART 8006 8007 4200-TRX-1 4200-TRX-2 C-V OPTIONS 4200-590 5909 4200-TRX-3 4200-MTRX-1 SWITCH MATRIX OPTIONS Ultra Low Current 100fA offset, 30V offset, remote or local sense Low Current 1pA offset, 40V offset, 12-360 pins, local sense only General Purpose 100pA offset, 5V offset, 12-360 pins, remote sense 4200-MTRX-2 4200-MTRX-3 SEMICONDUCTOR CABINETS AND MOUNTING ACCESSORIES 4200-CAB-20UX 4200-CAB-25UX 4200-CAB-34UX 4200-RM 4200-CRT-RM 4200-KEY-RM 2288-1G 20U Cabinet (35 in.) 25U Cabinet (44 in.) 34U Cabinet (60 in.) Slide Rack Mounting Kit for 4200-SCS/F and 4200-SCS/C Fixed Rack Mounting Kit for 4200-CRT Slide Rack Mounting Kit for standard keyboard and pointing device Model 590 Rack Mount Kit 236-ILC-3 7007-1 7007-2 7078-TRX-BNC 1.888.KEITHLEY (U.S. only) www.keithley.com A GREATER MEASURE OF CONFIDENCE 4200-SCS Semiconductor Characterization System Test Sequencing The Keithley Interactive Test Environment (KITE) provides "point and click" test sequencing on a device, a group of devices (subsite, module, or test element group), or a user-programmable number of probe sites on a wafer. Keithley User Library Tool (KULT) The Keithley User Library Tool supports creating and integrating C-language subroutine libraries with the test environment. User library modules are accessed in KITE through User Test Modules. Factory supplied libraries provide up and running capability for supported instruments. Users can edit and compile subroutines, then integrate libraries of subroutines with KITE, allowing the 4200-SCS to control an entire test rack from a single user interface. KULT is derived from the Keithley S600 and S400 Series Parametric Test Systems. This simplifies migration of test libraries between the 4200-SCS and Keithley parametric test systems. SPECIFICATION CONDITIONS Specifications are the performance standards against which the 4200-SMU, 4210-SMU, and 4200-PA are tested. The measurement and source accuracy are specified at the termination of the supplied cables. * 23C 5C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warm-up. * Speed set to NORMAL. * Guarded Kelvin connection. * 1C and 24 hours from ACAL. KITE Projects A project is a collection of related tests, organized in a hierarchy that parallels the physical layout of the devices on a wafer. KITE operates on projects using an interface called the project navigator. The project navigator simplifies organizing test files, test execution, and test sequencing. The project navigator organizes tests into a logical hierarchy presented in a browser style format. This structure allows users to define projects around wafer testing: * The project level organizes subsites and controls wafer looping execution. * The subsite level organizes devices and controls subsite test sequencing. * The device level organizes test modules, manages test module libraries and controls device test sequencing. * The test module level performs tests, analyzes data, and plots results. Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user-programmable number of probe sites on a wafer. Contact the factory for a list of supported analytical probers. A manual prober mode prompts the operator to perform prober operations during the test sequence. CURRENT SPECIFICATIONS Current Range1 Max. Voltage Resolution3 Measure Accuracy (% rdg + amps) 0.100 % 0.045 % 0.045 % 0.037 % 0.035 % 0.033 % 0.050% 0.050% 0.050% 0.050 % 0.050 % 0.100 % 0.500% 1.000% + + + + + + + + + + + + + + 200 A 3 A 3 A 300 nA 30 nA 3 nA 600 pA 100 pA 30 pA 1 pA 100 fA 30 fA 15 fA 10 fA Resolution3 50 5 5 500 50 5 500 50 5 500 50 15 5 1.5 A A A nA nA nA pA pA pA fA fA fA fA fA Source Accuracy (% rdg + amps) 0.100 % 0.050% 0.050 % 0.042 % 0.040 % 0.038 % 0.060% 0.060% 0.060% 0.060 % 0.060 % 0.100 % 0.500% 1.000% + + + + + + + + + + + + + + 350 A 15 A 15 A 1.5 A 150 nA 15 nA 1.5 nA 200 pA 30 pA 3 pA 300 fA 80 fA 50 fA 40 fA 4210-SMU2 High Power SMU 4200-SMU2 Medium Power SMU 4200-SMU and 4210-SMU with optional 4200-PA PreAmp 1 100 100 10 1 100 10 1 100 10 1 100 10 1 A mA mA mA mA A A A nA nA nA pA pA pA 21 V 210 V 21 V 210 V 210 V 210 V 210 V 210 V 210 V 210 V 210 V 210 V 210 V 210 V 1 100 100 10 1 100 10 1 100 10 3 1 0.3 100 A nA nA nA nA pA pA pA fA fA fA fA fA aA VOLTAGE COMPLIANCE: Bipolar limits set with a single value between full scale and 10% of selected voltage range. Voltage Range1 Max. Current 4200-SMU 4210-SMU 105 mA 1.05 A 1.05 A 1.05 A Measure Resolution3 200 V 20 V 2 V 1 V Accuracy (% rdg + volts) 0.015 0.01 0.012 0.012 % + 3 mV % + 1 mV % + 150 V % + 100 V Resolution3 5 500 50 5 mV V V V Source Accuracy (% rdg + volts) 0.02% + 15 mV 0.02% + 1.5 mV 0.02% + 300 V 0.02% + 150 V 200 V 4 20 V 2V 200 mV 10.5 105 105 105 mA mA mA mA CURRENT COMPLIANCE: Bipolar limits set with a single value between full scale and 10% of selected current range. 1.888.KEITHLEY (U.S. only) www.keithley.com A GREATER MEASURE OF CONFIDENCE SEMICONDUCTOR VOLTAGE SPECIFICATIONS Lab grade DC device charactterization 4200-SCS Semiconductor Characterization System MAXIMUM LOAD CAPACITANCE: 10nF. MAXIMUM GUARD OFFSET VOLTAGE: 3mV from FORCE. GUARD OUTPUT IMPEDANCE: 100k. MAXIMUM GUARD CAPACITANCE: 1500pF. MAXIMUM SHIELD CAPACITANCE: 3300pF. 4200-SMU and 4210-SMU SHUNT RESISTANCE (FORCE to COMMON): >1012 (100nA-1A ranges). 4200-PA SHUNT RESISTANCE (FORCE to COMMON): >1016 (1pA and 10pA ranges), >1013 (100pA-100nA ranges). OUTPUT TERMINAL CONNECTION: Dual triaxial connectors for 4200-PA, dual mini-triaxial connectors for 4200-SMU and 4210-SMU. NOISE CHARACTERISTICS (typical): Voltage Source (rms): 0.01% of output range. Current Source (rms): 0.1% of output range. Voltage Measure (p-p): 0.02% of measurement range. Current Measure (p-p): 0.2% of measurement range. MAXIMUM SLEW RATE: 0.2V/s. Supplemental Information Supplemental information is not warranted, but provides useful information about the 4200-SMU, 4210-SMU, and 4200-PA. COMPLIANCE ACCURACY: Voltage compliance equals the voltage source specifications. Current compliance equals the current source specifications. OVERSHOOT: <0.1% typical. Voltage: Full scale step, resistive load, and 10mA range. Current: 1mA step, RL = 10k, 20V range. RANGE CHANGE TRANSIENT: Voltage Ranging: <200mV . Current Ranging: <200mV . ACCURACY SPECIFICATIONS: Accuracy specifications are multiplied by one of the following factors, depending upon the ambient temperature and humidity. % Relative Humidity Temperature 5-60 60-80 10-18C x3 x3 18-28C x1 x3 28-40C x3 x5 REMOTE SENSE: <10 in series with FORCE terminal not to exceed a 5V difference between FORCE and SENSE terminals. 30V maximum between COMMON and SENSE LO. Model 4200-SCS Specifications Additional Specifications MAX. OUTPUT POWER: 22 watts for 4210-SMU and 2.2 watts for 4200-SMU (both are four-quadrant source/sink operation). DC FLOATING VOLTAGE: COMMON can be floated 32 volts from chassis ground. GENERAL TEMPERATURE RANGE Operating: +10 to +40C. Storage: -15 to +60C. HUMIDITY RANGE Operating: 5% to 80% RH, non-condensing. Storage: 5% to 90% RH, non-condensing. ALTITUDE Operating: 0 to 2000m. Storage: 0 to 4600m. POWER REQUIREMENTS: 100V to 240V 50 to 60Hz. , MAXIMUM VA: 500VA. REGULATORY COMPLIANCE: Safety: Low Voltage Directive 73/23/EEC. EMC: Directive 89/336/EEC. DIMENSIONS: 43.6cm wide x 22.3cm high x 56.5cm deep (17532 in x 834 in x 2214 in). WEIGHT (approx.): 29.7kg (65.5 lbs) for typical configuration of four SMUs. I/O PORTS: SVGA, Printer, RS-232, GPIB, Ethernet, Mouse, Keyboard. VOLTAGE MONITOR (SMU in VMU mode): Voltage Range 200 V 20 V 2V 200 mV INPUT IMPEDANCE: >1013. INPUT LEAKAGE CURRENT: <30pA. MEASUREMENT NOISE: 0.02% of measurement range (rms). Measure Resolution 200 V 20 V 2 V 1 V Measure Accuracy (%rdg + volts) 0.015% + 3 mV 0.01% + 1 mV 0.012% + 110 V 0.012% + 80 V DIFFERENTIAL VOLTAGE MONITOR: Differential Voltage Monitor is available by measuring with two SMUs in VMU mode, or by using the low sense terminal provided with each SMU. NOTES 1 GROUND UNIT SEMICONDUCTOR Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU, and 4200-PA specifications. No additional errors are introduced when using the ground unit. OUTPUT TERMINAL CONNECTION: Dual triaxial, 5-way binding post. MAXIMUM CURRENT: 2.6A using dual triaxial connection; 4.4A using 5-way binding posts. LOAD CAPACITANCE: No limit. CABLE RESISTANCE: FORCE 1, SENSE 10. All ranges extend to 105% of full scale. Specifications apply on these ranges with or without a 4200-PA. Specified resolution is limited by fundamental noise limits. Measured resolution is 612 digits on each range. Source resolution is 412 digits on each range. 4 Interlock must be engaged to use the 200V range. 2 3 1.888.KEITHLEY (U.S. only) www.keithley.com A GREATER MEASURE OF CONFIDENCE |
Price & Availability of 4200-SCS
 |
|
|
|
|
All Rights Reserved © IC-ON-LINE 2003 - 2022 |
| [Add Bookmark] [Contact Us] [Link exchange] [Privacy policy] |
|
Mirror Sites : [www.datasheet.hk]
[www.maxim4u.com] [www.ic-on-line.cn]
[www.ic-on-line.com] [www.ic-on-line.net]
[www.alldatasheet.com.cn]
[www.gdcy.com]
[www.gdcy.net] |